Chinese Optics Letters, 2007, 5 (3): 164, Published Online: Mar. 12, 2007
Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement Download: 641次
Abstract
A sinusoidal phase-modulating (SPM) laser diode (LD) interferometer for real-time surface profile measurement is proposed and its principle is analyzed. The phase signal of the surface profile is detected from the sinusoidal phase-modulating interference signal using a real-time phase detection circuit. For 60*60 measurement points of the surface profile, the measuring time is 10 ms. A root mean square (RMS) measurement repeatability of 3.93 nm is realized, and the measurement resolution reaches 0.19 nm.
Guotian He, Xiangchao Wang, Aijun Ceng, Feng Tang. Sinusoidal phase-modulating laser diode interferometer for real-time surface profile measurement[J]. Chinese Optics Letters, 2007, 5(3): 164.