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综 述飞秒激光微加工:激光精密加工领域的新前沿

Femtosecond Laser Micromachining: Frontier in Laser Precision Micromachining

何飞   程亚  
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摘要

飞秒激光微加工技术具有加工精度高、热效应小、损伤阈值低以及能够实现真正的三维微结构加工等优点,这些特性是传统的激光加工技术所无法取代的。首先回顾了激光微加工和超短脉冲激光技术的发展历史,然后介绍超短脉冲激光与金属和介质材料相互作用的机制,接着阐述了飞秒激光直写、干涉和投影制备等各种加工方法的原理,重点讨论飞秒激光在三维光子器件集成、微流体芯片制备及其在生化传感方面的应用等,最后展望了飞秒激光微加工领域所面临的机遇和挑战,指出了未来的研究方向。

Abstract

Femtoseond laser micromachining enables fabrication of true three-dimensional (3D) microstructures with high precision and low heat effect and damage threshold, showing unique advantages over the traditional laser micromachining technology. We first review the histories of laser microprocessing and ultra-short pulse laser technology, and then outline the mechanisms of the interactions of ultra-short laser pulse with metals and transparent media. Next, we introduce several major technical approaches in the field of femtosecond laser micromachining such as femtosecond laser direct writing, multi-beam interference and projection patterning, as well as their applications in fabrication of 3D integrated optical devices, microfluidic chips, and chemical and biological sensors, etc. Lastly, we highlight the opportunities and challenges in the field, and suggest some directions for the future research.

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中图分类号:TN 249

所属栏目:综述

收稿日期:2007-03-30

修改稿日期:2007-04-24

网络出版日期:0001-01-01

作者单位    点击查看

何飞:中国科学院上海光学精密机械研究所强场激光物理国家重点实验室, 上海 201800
程亚:中国科学院上海光学精密机械研究所强场激光物理国家重点实验室, 上海 201800

联系人作者:何飞(hef@siom.ac.cn)

备注:何飞(1984—),男,湖北人,硕士研究生,主要从事飞秒激光材料微加工方面的研究。

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引用该论文

何飞,程亚. Femtosecond Laser Micromachining: Frontier in Laser Precision Micromachining[J]. Chinese Journal of Lasers, 2007, 34(5): 595-622

何飞,程亚. 综 述飞秒激光微加工:激光精密加工领域的新前沿[J]. 中国激光, 2007, 34(5): 595-622

被引情况

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