分析了理想无波像差条件下和有随机波像差条件下光束漂移误差与长曝光光斑光束质量β因子的关系,得出光束漂移误差与长曝光光斑的光束质量β因子的关系。理论分析和数值仿真结果显示,光束漂移误差对长曝光光斑的光束质量β因子的影响与无光束漂移误差时系统初始光束质量无关,而与光束质量β因子的评价标准和光学系统中心遮拦比有关。分析了实际应用场景下对光束漂移误差的要求,指出对长曝光光斑光束质量的要求越高,允许的光束漂移误差越小。

The relationship between the beam excursion error and the beam quality β factor of long-term exposure spot was analyzed with and without random wavefront error. The formula to calculate the beam quality β factor of long-term exposure spot with beam excursion error was given. The theoretic analysis and the numerical calculation results indicate that beam quality affected by beam excursion error was independent of the beam quality without beam excursion error, but relative to the criterion of the beam quality β factor and the obstructed ratio of optics system. The beam excursion error request in application was analyzed. The results indicate that the better the beam quality wanted, the smaller the beam excursion error needed.