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Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer

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Abstract

To resolve the conflict of large measurement range and high accuracy in the existing real-time laser diode (LD) interferometers for displacement measurement, a novel real-time LD interferometry for displacement measurement is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 microseconds.

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收稿日期:2006-10-27

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何国田:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800Graduate School of the Chinese Academy of Sciences, Beijing 100039
:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800Graduate School of the Chinese Academy of Sciences, Beijing 100039
曾爱军:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800Graduate School of the Chinese Academy of Sciences, Beijing 100039
唐锋:Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800Graduate School of the Chinese Academy of Sciences, Beijing 100039
黄炳杰:Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800

联系人作者:何国田(slhgt@siom.ac.cn)

备注:This work was supported by the National Natural Science Foundation of China (No. 60578051) and the Science and Technology Committee of Shanghai (No. 051107085 and 06QB14047). G. He's e-mail address is slhgt@siom.ac.cn.

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引用该论文

Guotian He, Xiangzhao Wang, Aijun Zeng, Feng Tang, Bingjie Huang, "Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer," Chinese Optics Letters 5(4), 211-214 (2007)

被引情况

【1】杨馥,贺岩,陈卫标. 星载激光相干测高计的参量设计. 光学学报, 2008, 28(3): 573-577

【2】Lieshan Zhang,Xiaolin Zhang,Wenyan Tang. Amplitude measurement of weak sinusoidal water surface acoustic wave using laser interferometer. Chinese Optics Letters, 2015, 13(9): 91202-91206

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