Chinese Optics Letters, 2007, 5 (4): 211, Published Online: Jun. 26, 2007  

Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer Download: 672次

Author Affiliations
1 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
2 Graduate School of the Chinese Academy of Sciences, Beijing 100039
3 Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800
Abstract
To resolve the conflict of large measurement range and high accuracy in the existing real-time laser diode (LD) interferometers for displacement measurement, a novel real-time LD interferometry for displacement measurement is proposed and its measurement principle is analyzed. By use of a new phase demodulation algorithm and a new phase compensation algorithm of real-time phase unwrapping, the measurement accuracy is improved, and the measurement range is enlarged to a few wavelengths. In experiments, the peak-to-peak amplitude of the speaker vibration was 2361.7 nm, and the repeatability was 2.56 nm. The measurement time was less than 26 microseconds.

Guotian He, Xiangzhao Wang, Aijun Zeng, Feng Tang, Bingjie Huang. Real-time displacement measurement with large range and high accuracy using sinusoidal phase modulating laser diode interferometer[J]. Chinese Optics Letters, 2007, 5(4): 211.

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