Chinese Optics Letters, 2007, 5 (5): 278, Published Online: Jun. 27, 2007
A new subdivision technique for grating based on CMOS microscopic imaging Download: 674次
光栅 细分 CMOS显微成像 图像处理 测量精度 120.3930 Metrological instrumentation 050.2770 Gratings 110.2960 Image analysis
Abstract
We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle are theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm and the maximum displacement error is less than 0.4 micron. The factors contributing to the systemic error are also discussed.
Bo Yuan, Huimin Yan, Xiangqun Cao, Bin Lin. A new subdivision technique for grating based on CMOS microscopic imaging[J]. Chinese Optics Letters, 2007, 5(5): 278.