Chinese Optics Letters, 2007, 5 (5): 278, Published Online: Jun. 27, 2007  

A new subdivision technique for grating based on CMOS microscopic imaging Download: 674次

Author Affiliations
State Key Laboratory of Modern Optical Instrumentation, CNERC for Optical Instrument, Zhejiang University, Hangzhou 310027
Abstract
We propose a new subdivision technique directly subdividing the grating stripe by using complementary metal-oxide semiconductor (CMOS) microscopic imaging system combined with image processing. The corresponding optical system, subdivision principle, and image processing methods are illuminated. The relations of systemic resolution to subdivision number, grating period, magnifying power and tilt angle are theoretically discussed and experimentally checked on the Abbe comparator. The measurement precision for displacement of the proposed subdivision system is tested in the range of 5 mm and the maximum displacement error is less than 0.4 micron. The factors contributing to the systemic error are also discussed.

Bo Yuan, Huimin Yan, Xiangqun Cao, Bin Lin. A new subdivision technique for grating based on CMOS microscopic imaging[J]. Chinese Optics Letters, 2007, 5(5): 278.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!