光学学报, 1994, 14 (10): 1054, 网络出版: 2007-08-17
全硅矩形截面脊形波导的研制及其损耗分析
Fabrication of All-Silicon Ridge Waveguide with Rectangular Cross-Section and Its Loss Analysis
摘要
运用有效折射率法和微分法分别对全硅矩形截面脊形波导的模式特性和模吸收损耗系数作了分析.通过乙二胺-邻苯二酚水溶液(EPW)各向异性腐蚀的方法,研制成了矩形截面脊形全硅光波导,并对其损耗特性进行了研究和讨论.
Abstract
Based on the effective index method and the differentution medthod, modes characteristic and modes absorption loss coefficient of all sillion ridge waveguide with rectangular cross-section are analysed. By using anistropic etching with Ethlendiamine Pyrocatechol-Water Solution (EPW), all-silicon ridge waveguides with rectangular cross-section have been fabricated, and its loss characteristics have been discussed and analysed.
赵策洲, 刘恩科, 郑玉祥, 杨风丽, 李道全, 刘志敏. 全硅矩形截面脊形波导的研制及其损耗分析[J]. 光学学报, 1994, 14(10): 1054. 赵策洲, 刘恩科, 郑玉祥, 杨风丽, 李道全, 刘志敏. Fabrication of All-Silicon Ridge Waveguide with Rectangular Cross-Section and Its Loss Analysis[J]. Acta Optica Sinica, 1994, 14(10): 1054.