光学学报, 1992, 12 (5): 473, 网络出版: 2007-09-11
氧化物薄膜的离子束溅射沉积
Ion-beam sputtering deposition of oxide coatings
摘要
用离子束溅射沉积的方法制备的TiO2、ZrO2薄膜的光吸收损耗明显降低,对其折射率、光吸收和抗激光损伤阈值等特性进行了分析.
Abstract
TiO2 and ZrO2 thin films were deposited by ion-beam sputtering. Their refractive indices, optical absorption and laser-induced damage thresholds are investigated. The optical absorption of the coatings are decreased obviously.
汤雪飞, 范正修, 王之江. 氧化物薄膜的离子束溅射沉积[J]. 光学学报, 1992, 12(5): 473. 汤雪飞, 范正修, 王之江. Ion-beam sputtering deposition of oxide coatings[J]. Acta Optica Sinica, 1992, 12(5): 473.
PDF全文
