应用光学, 2007, 28 (4): 0496, 网络出版: 2010-06-03
具有位移和绝对距离测量能力的回馈干涉系统
Laser feedback interferometric system for both displacement and absolute distance measurement
移频回馈干涉 泵浦调制调频 位移 绝对距离 相敏检波 frequency-shifted laser feedback interference frequency modulation induced by pump modulation displacement absolute distance phase-sensitive detection
摘要
提出一种基于半导体激光器泵浦Nd∶YAG微片激光器的回馈干涉系统,适合于非配合目标的位移和绝对距离测量。该测量系统包括移频回馈干涉光学系统,基于泵浦调制的微片激光器调频系统和相敏检波信号处理系统3部分。介绍了移频回馈干涉的原理,给出了位移测量和绝对距离测量应用的原理和测量方法,分析了测量的分辨率。实际测量了发黑工件表面的位移和绝对距离。实验结果表明,该回馈干涉系统灵敏度高,对被测表面反射率的要求很低,兼有对非配合目标的高分辨率位移测量和绝对距离测量的能力。
Abstract
A laser feedback interferometric system for measuring both the displacement and absolute distance of non-cooperative objects is presented. The system is based on a laser-diode pumped Nd∶YAG microchip laser,and it is comprised of a frequency-shifted laser feedback interferometer,a frequency-modulated microchip laser based on pumping modulation and a phase-sensitive detection device. The principle of frequency-shifted laser feedback interference is introduced. The principle and method of displacement and absolute distance measurements are elaborated. The measurement resolution was analyzed. The displacement and absolute distance of a blacken workpiece surface were detected experimentally in the laboratory. The results prove that the interferometric system has high sensitivity and relaxed requirement for the reflectivity of the UUT surface,and meets the need of both displacement and absolute distance measurements for uncoupled objects.
李铎, 万新军, 张书练. 具有位移和绝对距离测量能力的回馈干涉系统[J]. 应用光学, 2007, 28(4): 0496. LI Duo, WAN Xin-jun, ZHANG Shu-lian. Laser feedback interferometric system for both displacement and absolute distance measurement[J]. Journal of Applied Optics, 2007, 28(4): 0496.