综述了短脉冲激光清洗细微颗粒技术的研究进展状况，介绍了其研究背景和基本理论模型；阐述了它的应用成果，包括短脉冲激光清洗细微颗粒的“干式”清洗技术和“液膜”清洗技术；总结了该技术对细微颗粒清洗效果的影响因素及规律；并展望了该技术今后的发展方向。

The development of cleaning tiny particle technology by short-pulsed laser is reviewed. At first its research background and basic theoretical model are introduced. Then its applications such as the dry laser cleaning and the steam laser cleaning are described and the influence factors on the cleaning effect are summed up. Finally some predictions of its future development are presented.