采用Twyman光路结构和LED为光源进行白光干涉三维测量, 对干涉图像及元件面型的重构算法进行了仿真研究。使用Matlab软件, 选取了两种面型结构函数, 仿真得出重构的面型, 选取5个参考点进行了对比。研究结果表明, 白光干涉测量具有高精度、测量时间短、相对误差小于0.5%。

Twyman optical circuit structure and LED light source are used in white light three-dimensional interferometry. The reconstruction algorithms of interference images and component surface are simulated. Using Matlab software, two kinds of surface structure functions are chosen to simulate the reconstructed surface and choose five reference points to compare. Research results show that white interferometry has high accuracy, short measurement time and relative error is less than 0.5%.