设计并研制了一种多单元半导体激光器的高亮度光纤耦合输出模块。激光器芯片采用分子束外延(MBE)方法生长的宽波导、双量子阱结构AlGaAs/GaAs激光器外延材料,激光器模块采用4只准直的单条形大功率半导体激光器,器件腔长为2 mm,发光区宽度为100μm,单条形器件的连续输出功率为5.0 W,每两只单条形器件的准直输出光束经过空间合束后再通过偏振合束,实现了多单元器件输出的高光束质量功率合成,采用简单的平凸透镜实现了合束光束与100 μm芯径、数值孔径(NA)0.22石英光纤的高效耦合,耦合效率高达79%,输出功率达10.17 W,光纤端面功率密度达1.0×105 W/cm2。

A high brightness fiber coupling laser module with multiplex diode lasers (LDs) has been designed and fabricated. The diode laser chips has been fabricated with AlGaAs/GaAs material with broad waveguide and double quantum wells structure by molecular beam epitaxy (MBE), and the module contains 4 collimated single broad area stripe diode lasers which can reach to continuous wave (CW) 5 W output power with emission width of 100 μm and cavity length of 2 mm. Output combination with high beam quality has been obtained by first space beam combination of each two devices and consequent polarization beam combination,and the combined four-beam output has been coupled into a 100 μm-core quartz fiber with numerical aperture (NA) 0.22 by a simple flat-convex lens. Finally, a 10.17 W output power from the fiber with a high power density of 1.0×105 W/cm2 is achieved, and the total coupling efficiency is as high as 79%.