光学学报, 1993, 13 (7): 670, 网络出版: 2007-12-07
共路外差表面轮廓仪
Heterodyne common path surface profilometer
摘要
本文提出了一种改进的外差共路干涉仪,用于表面粗糙度的测量,它对机械振动、温度变化等极不敏感,纵向分辨率为0.1nm,可用于表面粗糙度的实际检测工作.
Abstract
As a modified heterodyne profilometer the heterodyne common path surface profilometer for measuring surface roughness is described. The profilometer is not sensitive to mechanical instability and temperature variations. The actual height resolution is 0. 1 nm and this system could be developed into a standard instrument for surface roughness measurement.
韩昌元, 刘斌, 卢振武, 张晓辉, 顾去吾. 共路外差表面轮廓仪[J]. 光学学报, 1993, 13(7): 670. 韩昌元, 刘斌, 卢振武, 张晓辉, 顾去吾. Heterodyne common path surface profilometer[J]. Acta Optica Sinica, 1993, 13(7): 670.
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