为提高在微变形镜应用中静电微致动器的冲程,设计并讨论了一种基于双端固定梁为上电极、曲面 电极为下电极的异面微致动器。利用Rayleigh-Ritz方法,求解了致动器的静态特性。计算过程 中,考虑了梁长度增大引起的抗拉应力和器件制造过程中残余应力的影响。通过研究不同的曲 面电极轮廓形状对于致动器冲程的影响,得到了500 μm长的梁在300 V的驱动电压下其冲程 最大能达到14.1 μm。

In an effort to extend the stroke of micro-actuators in micro-deformable mirrors, out-of-plane actuators with curved electrode and clamped-clamped beam are investigated. The static behaviors of actuators are solved by using the Rayleigh-Ritz method. During the calculation, tension stress and residual stress were considered. By studying the effects in stroke of actuators with different electrode shapes, actuators with a 500 μm long beam with a maximum stroke of 14.1 μm are obtained when subjected to the voltage of 300 V.