采用等离子体气相凝聚技术制备了银纳米团簇颗粒, 开展了实验条件及工艺参数对团簇平均粒径和粒径分布的影响。利用四极质谱分析仪在线测量了银纳米团簇的粒径尺寸与分布, 并与透射电子显微镜(TEM)离线测量值进行比对。研究结果表明: 保持其他参数不变时, 增大结露区长度或溅射电流, 银纳米团簇的平均粒径尺寸将增大; 增加氩气流量, 银团簇粒子平均粒径也相应增大, 但当氩气流量增至60 mL/min以上时, 其平均粒径反而会减小。而氦气的加入会使平均粒径尺寸减小。在各工艺参数中, 溅射电流和氩气流量是影响银纳米团簇平均粒径的主要因素。通过调节工艺条件, 获得了平均粒径尺寸为2, 4和6 nm的银纳米团簇, 四极质谱仪监测的粒径分布与TEM离线表征结果总体一致。

Ag nanoclusters are prepared by plasma gas condensation method, The parameter dependences of Ag nanoclusters are also studied. The particle diameter and size distribution are measured by in-situ quadrupole mass filter and compared with the analysis of transmission electron microscope (TEM). The results show that keeping other parameters fixed, the average size increases gradually with the increase of sputtering current, aggregation zone length and Ar flow rate, respectively. However, it decreases when the Ar gas flow rate is more than 60 mL/min. The addition of He in Ar gas causes the decline of the average size, which can be enhanced by increasing the He flow rate. The sputtering current and Ar flow rate are key parameters affecting the average size of Ag nanoclusters.The TEM results show that average size of Ag nanoclusters is 2, 4 and 6 nm, respectively by adjusting the parameters. It is also indicated that the size and distribution data of Ag nanoclusters by TEM analysis and in situ quadrupole mass spectrometer are consistent.