Chinese Optics Letters, 2008, 6 (2): 02149, Published Online: Mar. 5, 2008
Novel optical lithography using silver superlens 
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Abstract
This work has demonstrated that with silver superlens, the resolution of conventional optical lithography can be improved significantly. Experimental and simulative results are given to verify the facts that the resolution and the pattern fidelity are sensitive to the contact tightness between layers.
Haiyan Qin, Xuan Li, Su Shen. Novel optical lithography using silver superlens[J]. Chinese Optics Letters, 2008, 6(2): 02149.
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