为了进一步分析线性相位反演波前传感器的性能,搭建了基于线性相位反演测量方法的波前传感器的实验装置。针对各种波前随机像差,同时用线性相位波前传感器和哈特曼波前传感器进行测量和复原,将复原结果进行对比。分析了不同的探测分辨力和不同泽尼克复原阶数对线性相位反演传感器复原结果的影响。分析了靶面分辨力,合理的靶面大小对复原精度是有利的,肯定了线性相位反演波前传感器可以用较少的探测单元实现相似精度的测量,采样靶面像素为8 pixel×8 pixel时,误差系数仍很小。利用对随机像差片进行不同阶数的复原,线性相位反演波前传感器的复原残差的误差率基本都在0.25以下,能对前35阶像差进行比较精确的复原。

In order to analyze the performance of linear phase retrieval (LPR) sensor, an experimental setup based on the LPR method has been built. The measurement and wavefront retrieval of LPR sensor and Hartman wavefront sensor were compared on the same stochastic wavefront aberration. The influence of different detection resolution and Zernike retrieval order on retrieval results has been compared and analyzed. After analyzing the target resolution, it is considered that reasonable target size will benifit retrieval precision. At the same time, the LPR sensor can realize similiar precision measurement with less detection cells. With a target resolution of 8 pixel×8 pixel in experiment the error coefficient is small. The retrieval results of different orders, show the error ratio is less than 0.25 and it is comparatively accurate to retrieve pre-35 order aberrations.