介绍了一种高精度的光电探测器线性测量系统,讨论了线性测量的方法,确定以光束叠加法为线性测量系统的基础。设计了测量系统,以944 nm激光器为光源,测量了Si陷阱探测器和InGaAs陷阱探测器的非线性因子。实验结果表明,利用该系统在0.1～200 μW的入射光功率范围内。Si陷阱探测器非线性因子平均值小于0.009％,联合不确定度小于3.18%; InGaAs陷阱探测器非线性因子平均值小于0.6％,联合不确定度小于6.87％。实验结果证明该系统可以作为高精度光电探测器线性测量装置。

A linearity measurement systems of accurate photodetector is described. The principle of linearity measurement methods is dicussed, and the beam-addition method is used in this measurement system. Structure of measurement system is designed, and the linearity measurement of Si trap photodetector and InGaAs trap photodetector is done with 944 nm laser. Experimental results show in the range of laser power (0.1～200 μW), the measured nonlinearity factor of Si trap photodetector is less than 0.009%, and its combined uncertainty is less than 3.18%, the measured nonlinearity factor of InGaAs trap photodetector is less than 0.6%, and its combined uncertainty of measurement is less than 6.87%. Experimental results prove that the system can be used in accurate photodetector’s linearity measurement.