Chinese Optics Letters, 2008, 6 (5): 342, Published Online: May. 20, 2008
Study on an improved five-interferogram phase-shifting algorithm Download: 792次
多光束干涉 五幅相依算法 精密测长 相位误差 120.3180 Interferometry 120.2650 Fringe analysis 120.2230 Fabry-Perot 120.3930 Metrological instrumentation 120.3940 Metrology
Abstract
Using traditional five-interferogram algorithm to unwrap phase for length measurement, the phase steps must be equal to \pi/2 exactly, but it is almost impossible to achieve in nanometer positioning technique. Aiming to overcome this defect of traditional five-interferogram algorithm, an improved five-interferogram algorithm is presented. This improved algorithm not only keeps the high accuracy of traditional five-interferogram algorithm, but also does not need absolute equal step to unwrap phase. Instead, this algorithm only needs measuring phase-shifting. With the numerical simulation, the improved five-interferogram algorithm shows high accuracy, high reliability, and feasibility in practice. It is very valuable for accurate length measurement with Fizeau interferometer and Fabry-Perot interferometer.
Zhiyong Luo, Jialin Dai. Study on an improved five-interferogram phase-shifting algorithm[J]. Chinese Optics Letters, 2008, 6(5): 342.