基于微流控技术提出了一种新型可调光衰减器核心芯片结构，利用微流体和可压缩空气实现光衰减的可控调节，并基于此核心芯片设计了两种应用不同驱动技术的微流控光衰减器。通过高斯光束传播理论、亥姆霍兹方程、光场耦合理论与Mathematics软件分析了光衰减器内部光场分布特性，考虑了流体端面衍射影响，给出了流体端面位置与衰减量的关系及响应时间等性能参数。理论表明基于微流控技术的可调光衰减器衰减范围大于50 dB，系统响应时间约为0.01 s，具有衰减范围大、响应快、插入损耗小、回波损耗大的优点。所提出的光衰减器为寻求小体积、高性能、易集成、灵活可调的新型光通讯器件提供了新的思路。

Here the core structure of a new variable optical attenuator (VOA) based on microfluidics is presented, where the microfluid and compressible air are used to continuously change the optical energy by adjusting the attenuator. Based on this core structure, two variable optical attenuators using different driving technologies are given. By the propagation theory of Gaussian beam, Helmholtz equation, mode-coupling theory and Mathematics software, the optical field and characteristics of this VOA are researched in theory and the diffraction effect is discussed. The theory results indicate this VOA has big attenuation range (50 dB), quick response (0.01 s), small insertion loss and strong return loss. The presented attenuator can provide a new method for development of small, integrated and adjustable optical communication devices.