激光烧蚀-电感耦合等离子体质谱(LA-ICP-MS)技术不仅可以对导体及非导体进行元素的成分含量分析, 而且还可进行元素分布及涂层深度表面微区分析, 故在元素分析领域引起广泛的关注。主要介绍了LA-ICP-MS的仪器装置及其表面微区分析理论, 同时对LA-ICP-MS在钢铁、 有色金属及半导体等材料科学领域中的元素分布及涂层深度表面微区分析应用进展情况进行回顾, 与SEM/EDS(扫描电子显微镜/能谱仪)、 EPMA(电子探针微区分析)、 AES(俄歇电子能谱)等传统经典的表面分析方法的比较, LA-ICP-MS具有无需或很少样品制备、 空间分辨率可调、 多元素同时分析及灵敏度高等优点, 目前LA-ICP-MS已成为这些经典表面微区分析工具强有力的补充。随着LA-ICP-MS分析技术进一步的发展与成熟, 相信不久的将来越来越多的元素分析工作者会使用这一强有力的分析工具, 它像LIBS(激光诱导击穿光谱)一样, 将会成为元素分析领域非常耀眼的一颗新星。

In the present paper, apparatus and theory of surface analysis is introduced, and the progress in the application of laser ablation ICP-MS to microanalysis in ferrous, nonferrous and semiconductor field is reviewed in detail. Compared with traditional surface analytical tools, such as SEM/EDS (scanning electron microscopy/energy dispersive spectrum), EPMA (electron probe microanalysis analysis), AES (auger energy spectrum), etc. the advantage is little or no sample preparation, adjustable spatial resolution according to analytical demand, multi-element analysis and high sensitivity. It is now a powerful complementary method to traditional surface analytical tool. With the development of LA-ICP-MS technology maturing, more and more analytical workers will use this powerful tool in the future, and LA-ICP-MS will be a super star in elemental analysis field just like LIBS (Laser-induced breakdown spectroscopy).