为了将激光弯曲成形技术应用于精密位移调整领域实现亚微米精度的位移调整，自行设计和搭建了激光微位移调整与测量平台，将光纤激光通过线性透镜和扫描振镜聚焦在不锈钢薄板上作匀速扫描运动，实时监测加工过程样件自由端的输出位移。建立了样件激光微位移调整模型，在此基础上研究改变激光功率、扫描速度、光束照射位置以及离焦量等参数对调整位移的影响。结果表明，样件通过该平台实现了亚微米级重复精度的精密位移调整，改变激光照射位置是精确改变调整位移的首选；通过优化工艺参数，降低了激光加工过程中样件表面的损伤。

In order to achieve a sub-micron scale displacement adjustment in the field of precision adjustment using the laser bending technology, a laser micro displacement adjustment and measuring platform is built. A fiber laser is focused on the metal sample using f- θ lens and moves at constant velocity in a line direction through a galvanometer. The output displacement of the sample′ s free end is measured in real time. A simple closed- form model of laser micro displacement adjustment is established. The effect of laser power, scanning velocity, defocus distance and position of laser irritating on the output displacement is investigated. The experimental results show that an adjustment displacement with submicron scale repeatability on the metal plate sample can be realized in this platform and the best choice to achieve precision adjustment is to adjust the position of laser irritating. An adjustment with little damage to the sample surface is achieved through optimizing the process parameters.