作为一项重要的光学性能, 微型可编程光栅的最大闪耀角决定了其可用光谱波段。提出了两种微型可编程光栅最大闪耀角的实验测量方法, 同时搭建了一个简单的光学系统验证其可行性及有效性。测量结果与理论计算和数值仿真的结果比较吻合, 相对误差均小于3.5%。结合实验现象, 利用Matlab软件仿真分析了释放孔对衍射结果的影响, 为提高微型可编程光栅的光学性能提供了技术参考。

As an important optical performance, the maximum blazed angle decides the applicable spectrum band for the micro programmable grating. For achieving the maximum blazed angle of the fabricated micro programmable grating, two experimental measuring methods were proposed, and a simple optical system was set up for verifying their feasibility and efficiency. The measured results agree well with both the theoretical computation and numerical simulation, and the relative errors are less than 3.5%. In addition, according to the experimental phenomenon, a simulation with Matlab software was performed to analyze the influence of release holes on the diffraction pattern. It offers a technical reference for improving the optical performance of the micro programmable grating.