空间光学元件对面形精度和表面质量有着极高的要求, 气囊抛光采用了新型的抛光工具和特殊的运动形式, 是一种高精度、高效率的光学元件加工方法, 尤其适用于非球面的加工, 具有广阔的应用前景。分析了气囊抛光技术的基本原理及该技术的发展过程, 介绍了气囊抛光相关技术的研究情况和实验结果, 对几项关键技术的研究现状进行综述, 重点介绍材料去除特性、驻留时间控制算法、边缘精度控制以及最新开发的喷液抛光技术的研究情况。

Space optical elements require highly surface shape precision and surface quality. Bonnet polishing, with new polishing tool and special motion trait, is a high precision and efficient optical component machining method, especially for aspheric surface machining. It has a extensive application prospect. Principle and developing process of related bonnet polishing technology are analyzed, and research situation and test result of bonnet polishing technology are introduced. Current situation of several important and critical technologies is reviewed. The removing characteristics material, control algorithm of resident time, control of marginal precision and latest-developed spray polishing technology are introduced significantly.