光学学报, 2009, 29 (2): 417, 网络出版: 2009-02-23
相移正交物体运动方向的在线相位测量轮廓术
An On-Line Phase Measuring Profilometry with Phase-Shifting Perpendicular to Moving Direction of Measured Object
三维检测 在线测量 相位测量轮廓术 像素匹配 感兴趣区域 3D inspection on-line measurement phase measuring profilometry pixel matching region of interest
摘要
提出了一种新型的基于相位测量轮廓术(PMP)的在线三维检测方法。只需要使投射的条纹相移方向与物体移动方向垂直,尽管由于物体运动使CCD采集变形条纹中物体坐标不一致,但通过像素匹配,可以使各帧图像物点坐标一一对应,得到与传统静态PMP等效的相移条纹图,即可重构出物体,实现在线三维测量。对一实平面进行了在线与静态PMP测试对比实验。结果显示该在线PMP方法与传统静态PMP方法的均方差之差仅为0.007 mm,表明该在线PMP方法具有高精度性;对一实物进行了在线测试实验,很好地重构出了被测物体的三维轮廓,从而验证了该方法的可行性和有效性。
Abstract
A new method of on-line 3D measurement based on phase measuring profilometry(PMP) has been proposed. It only needs to ensure the phase-shift direction of the projected sinusoidal stripe perpendicular to the object′s moving direction. Though the spatial coordinates of the captured distorted stripe images by CCD are inconsistent, by pixel matching algorithm, this inconsistency can be excluded, in addition, the equivalent phase-shifting distorted patterns needed by PMP can been obtained successfully. The profile of the measured object can be reconstructed which put the on-line 3D measurement into practice. A contrast experiment on a known plane inspected by the on-line PMP and the traditional static PMP is carried on, and the difference of mean square deviation between the two methods is only 0.007 mm,which shows the high veracity of the on-line PMP.A complex workpiece has also been on-line inspected, and the 3D profile of the workpiece can be reconstructed perfectly, which shows the feasibility and validity of the on-line PMP.
钟立俊, 曹益平. 相移正交物体运动方向的在线相位测量轮廓术[J]. 光学学报, 2009, 29(2): 417. Zhong Lijun, Cao Yiping. An On-Line Phase Measuring Profilometry with Phase-Shifting Perpendicular to Moving Direction of Measured Object[J]. Acta Optica Sinica, 2009, 29(2): 417.