光学学报, 2009, 29 (2): 473, 网络出版: 2009-02-23   

探针诱导表面等离子体共振纳米光刻系统

Probe Inducing Surface Plasmon Resonance Nanolithographic System
作者单位
1 中国科学院上海光学精密机械研究所, 上海 201800
2 华东师范大学信息科学技术学院, 上海 200241
摘要
提出了一种在原子力显微镜(AFM)基础上设计的探针诱导表面等离子体共振纳米光刻(PSPRN)系统。此系统不但实现了探针的精确控制,而且由于系统本身具有AFM的全部功能,因此可以实时检测样品表面的形貌以及光刻效果。系统采用改进的Kretschmann型共振耦合器件,在棱镜和样品基板之间注入匹配折射率油,使样品更方便更换;利用声光调制器与AFM配合实现了等离子体激发光照射时间的精确控制。通过初步实验,在银(Ag)膜表面获得了直径100 nm左右的光刻点,验证了PSPRN的可行性。研究了光照时间、激光功率、激光入射角、材料厚度等因素对光刻点大小、深度的影响,为实现更小的光刻点提供了参考。
Abstract
A probe inducing surface plasmon resonance nanolithographic (PSPRN) system is introduced, which is constructed based on an atomic force microscope (AFM). Not only this system has realized accurate control of the probe, but the system itself has the complete function of AFM, it may examine surface appearance of the sample and the lithography effect in real time. The advanced Kretschmann resonance coupled device with index-matching oil between the prism and the substrate is used in this system, which makes the replacement of samples easier. Acousto-optic modulator combined with AFM is adopted to realize the accurate control of the irradiation time of plasma-excited laser. In preliminary experiment, lithographic spots with about 100nm in diameter are obtained on silver film, which has confirmed the feasibility of PSPRN. The effects of illumination time, laser power, material thickness, laser incident angle etc. on size and depth of lithography spots are studied, which provide reference for the realization of smaller lithographic spots.

赵成强, 徐文东, 洪小刚, 李小刚, 唐晓东. 探针诱导表面等离子体共振纳米光刻系统[J]. 光学学报, 2009, 29(2): 473. Zhao Chengqiang, Xu Wendong, Hong Xiaogang, Li Xiaogang, Tang Xiaodong. Probe Inducing Surface Plasmon Resonance Nanolithographic System[J]. Acta Optica Sinica, 2009, 29(2): 473.

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