光学学报, 2009, 29 (3): 811, 网络出版: 2009-03-17
空间光学元件超精密气囊抛光的去除特性研究
Removing Characteristics of Ultraprecise Bonnet Polishing on Spatial Optics Elements
空间光学 气囊抛光 去除特性 Preston方程 Hertz接触理论 space optics bonnet tool polishing removal function Preston function Hertz contact theory
摘要
为得到空间光学元件超光滑表面,对超精密气囊抛光方法的去除特性进行了理论和实验研究。以Preston方程为基础,应用运动学原理建立了气囊抛光“进动”运动的材料去除模型,针对抛光气囊工具的物理特性,按照Hertz接触理论对去除模型进行了修正; 利用计算机仿真的方法,分析了几个主要工艺参数对“进动”抛光运动去除特性的影响规律,并在超精密光学数控抛光机上进行了正交实验; 仿真和实验结果吻合较好,总结得到4点气囊抛光方法中重要的结论,给出了“进动”角与压缩量的取值范围,以此得到了面型精度RMS值为0.024 λ(λ=0.6328 μm)的超光滑表面,为开展光学元件气囊抛光工艺研究提供依据。
Abstract
Theoretical and experimental research on removing characteristics of ultraprecise bonnet polishing methods are made to get an ultra-smooth surface for optical elements. A material removing model of bonnet polishing processional motion is established according to kinematic principle based on Preston equation. The model is modified in terms of Hertz contact theory using the physical characteristics of polishing bonnet tools. The affect of several main technological parameters to removing characteristics of processional polishing motion is analyzed by means of computer simulation, and an orthogonal test is made on an ultraprecise numerical control polishing machine. The simulation results fit well with test results and four important conclusions on bonnet polishing technology are obtained. The span of processional angle and decrement is provided and an ultraprecise smooth surface with RMS=0.024 λ figure precision is achieved, which provides theoretical foundation to research on bonnet polishing technology of optical elements.
李洪玉, 张伟, 于国彧. 空间光学元件超精密气囊抛光的去除特性研究[J]. 光学学报, 2009, 29(3): 811. Li Hongyu, Zhang Wei, Yu Guoyu. Removing Characteristics of Ultraprecise Bonnet Polishing on Spatial Optics Elements[J]. Acta Optica Sinica, 2009, 29(3): 811.