以MEMS微变形镜驱动方式的选取为出发点, 从光学特性和力学特性两方面对MEMS微变形镜进行分析, 从中得出相关结构参数对微变形镜性能的影响关系, 并在此基础上结合补偿激光二极管抽运固体激光器(DPL)热畸变的使用要求设计了一种新型MEMS连续面型微变形镜, 并采用设计的MEMS变形镜搭建了一个闭环自适应光学实验系统, 补偿了激光光束的热畸变。实验结果显示该MEMS连续面型微变形镜可对腔内畸变进行有效补偿, 同时提高了激光器的输出功率及光束质量。

The drive mode of MEMS deformable micro-mirror is initially selected. Based on theoretical analysis of optics and mechanics characteristics of MEMS deformable micro-mirror, the relation between correlation structure parameter and performance of deformable mirror is obtained according to the requirements which compensate thermally induced aberration of laser diode. Pumped solid-state laser, a novel electrostatic actuated deformable micro-mirror with continuous facet is designed. It is used to set up a closed-loop control adaptive optics system, which has compensated thermally induced aberration of laser beam. The experimental result shows the intra-cavity aberration was effectively compensated and the output power and beam quality were improved by the novel MEMS deformable micro-mirror.