提出了一种新的微成形方法——激光驱动飞片加载金属箔板微成形技术, 结合飞片速度模型和加载压力模型阐述了成形机理, 利用10 μm厚的铝箔进行了初步成形实验。在体式显微镜下观察成形后的铝箔表面光滑, 并且与模具的贴合程度较高, 表现出很好的成形精度。考察了激光能量对铝箔成形深度的影响。通过表面轮廓形貌测量仪检测发现, 成形深度受激光能量的影响比较大。在光斑直径为1 mm, 单脉冲激光能量为25～40 mJ时, 铝箔成形深度随激光能量基本呈线性关系增加, 单脉冲激光能量在45～50 mJ时, 铝箔由于破裂成形深度大幅增加。

A new method for micro-forming——micro-forming technology of metal foil under laser driven flyer loading method is developed. The forming mechanism combined with flyer speed model and pressure loading model is discussed and preliminary forming experiments are completed. The surface of formed aluminum foils is smooth, and has high copying ability with good formed precision. The influence of laser energy on forming depth is examined by topography instrument when the laser spot diameter is 1 mm, and single pulse laser energy of 25-40 mJ, the forming depth of aluminum foils shows linear relationship with laser energy. With single pulse laser energy of 45-50 mJ, the forming depth increass largely due to the rupture.