Chinese Optics Letters, 2009, 7 (5): 05407, Published Online: May. 22, 2009
Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark
光学检测 误差补偿 计量仪器 120.1880 Detection 220.1000 Aberration compensation 120.3930 Metrological instrumentation
Abstract
A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented. It divides the full scale range into piece-wise subsections and compares the maximum variation of the measuring errors of two adjacent subsections with the threshold. Whether the specified subsection is divided into smaller subsections is determined by the comparison result. After different compensation parameters and weighted average values of the random errors are obtained, the error compensation algorithm is implemented in the left and right subsections, and the whole measuring error of the grating displacement measurement system is reduced by about 73%. Experimental results show that the method may not only effectively compensate the spike error but also greatly improve the precision of the measuring system.
Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, Lihua Huang. Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark[J]. Chinese Optics Letters, 2009, 7(5): 05407.