Chinese Optics Letters, 2009, 7 (5): 05407, Published Online: May. 22, 2009  

Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark

Author Affiliations
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China2 Graduate University of the Chinese Academy of Sciences, Beijing 100049, ChinaE-mail: xiaojunj@siom.ac.cn
Abstract
A method for compensating the measuring error of the grating displacement measurement system with absolute zero mark is presented. It divides the full scale range into piece-wise subsections and compares the maximum variation of the measuring errors of two adjacent subsections with the threshold. Whether the specified subsection is divided into smaller subsections is determined by the comparison result. After different compensation parameters and weighted average values of the random errors are obtained, the error compensation algorithm is implemented in the left and right subsections, and the whole measuring error of the grating displacement measurement system is reduced by about 73%. Experimental results show that the method may not only effectively compensate the spike error but also greatly improve the precision of the measuring system.

Xiaojun Jiang, Huijie Huang, Xiangzhao Wang, Lihua Huang. Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark[J]. Chinese Optics Letters, 2009, 7(5): 05407.

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