针对影响高速电荷耦合器件(CCD)性能参数的主要因素, 如CCD的频率特性、接地回路、电磁干扰、图像串音等进行研究, 设计研制出400 pixel×400 pixel高速可见光CCD, 测试分析显示, 该器件实现了高灵敏度、高动态范围、低噪声等性能指标, 较好地解决了高速CCD多抽头输出一致性、噪声、信号串扰等问题,从而验证了设计的合理性和有效性。

Major factors that influence the performance parameters of high-speed charge coupled device (CCD), such as CCD’s frequency response characteristics, grounding return, electromagnetic interference, image cross talk et al., were analyzed and considerated. A high-speed CCD sensor with 400 pixel×400 pixel was designed, fabricated and tested. The analysis shows that the CCD sensor has good performances and features such as good responsibility, high dynamic range and low noise et al., It was greatly improved for the multi-tapped high-speed CCD sensor to optimize its uniformity among multi-tapped outputs and to reduce its noise and signal cross talk, which shows that the design and layout used are reasonable and efficient.