研究了基于硅基集成光波导的马赫-曾德干涉仪(MZI)型化学传感芯片的设计、制备及相关敏感特性的模拟和分析。传感芯片采用硅基二氧化硅光波导材料, 利用与传统互补型金属氧化物半导体(CMOS)兼容的工艺技术制作。通过波导的单模设计以及对MZI结构的优化, 获得了有效折射率分辨率达到10-7量级的高灵敏度传感芯片。作为化学传感器, 把MZI的其中一臂设计成传感臂, 并进行适当的表面修饰, 可制作出高灵敏度的干涉型光波导化学传感器。最后, 对该传感器的折射率分辨率、敏感特性等进行了分析、模拟, 同时, 对面临的关键问题进行了分析和讨论。

The theoretical design, fabrication and characterisation of integrated optical phase-modulated Mach-Zehnder Interferometer(MZI) chemical sensing platform are presented. The sensor system, based on silica waveguide materials, is fabricated with ‘silicon microelectronics technology’. The optical waveguides are designed to mono-mode behaviour and high surface sensitivity. These sensor show a effective refractive index detection limit of 10-7. When the sensing waveguide is chemically modified, the sensing platform will show high sensitivity to opto-chemical reaction.. Finally, the refractive index resolution and sensing properties are simulated and analyzed, also, the coming key problems are discussed.