Chinese Optics Letters, 2009, 7 (8): 08709, Published Online: Aug. 17, 2009
Fabrication of high-power VCSEL with radial bridge electrodes Download: 637次
高功率半导体激光 垂直腔面发射激光器 径向桥电极 热阻 140.0140 Lasers and laser optics 140.7260 Vertical cavity surface emitting lasers 250.7260 Vertical cavity surface emitting lasers 140.6810 Thermal effects
Abstract
We report the fabrication of a novel high-power vertical-cavity surface-emitting laser (VCSEL) with radial bridge electrodes in this letter. The analysis shows that the radial bridge electrodes can reduce the p-type distributed Bragg reflector (p-DBR) electric and thermal resistance, and improve the device beam quality. The high-power radial brigde electrode VCSELs with 200-\mum aperture have been made and tested. The testing results show that the differential resistance of the VCSEL is 0.43 \Omega and the maximal continuous-wave (CW) output power is 340 mW, 1.7 times higher than the conventional electrode device. Its thermal resistance is 0.095 \Degress/mW, and its near-field pattern exhibits a homogeneous distribution. The high-power radial bridge electrode VCSEL has better temperature and opto-electric characteristics.
Lifeng Hou, Gang Zhong, Yingjie Zhao, Yongzhuang Yang, Yuxia Wang, Yongqin Hao, Yuan Feng, Xiaoguang Jiang, Haorui Xie. Fabrication of high-power VCSEL with radial bridge electrodes[J]. Chinese Optics Letters, 2009, 7(8): 08709.