Chinese Optics Letters, 2009, 7 (8): 08709, Published Online: Aug. 17, 2009  

Fabrication of high-power VCSEL with radial bridge electrodes Download: 637次

Author Affiliations
1 National Key Laboratory on High Power Semiconductor Lasers, Changchun University of Science and Technology, Changchun 130022, China
2 Armor Technique Institute of PLA, Changchun 130117, China
Abstract
We report the fabrication of a novel high-power vertical-cavity surface-emitting laser (VCSEL) with radial bridge electrodes in this letter. The analysis shows that the radial bridge electrodes can reduce the p-type distributed Bragg reflector (p-DBR) electric and thermal resistance, and improve the device beam quality. The high-power radial brigde electrode VCSELs with 200-\mum aperture have been made and tested. The testing results show that the differential resistance of the VCSEL is 0.43 \Omega and the maximal continuous-wave (CW) output power is 340 mW, 1.7 times higher than the conventional electrode device. Its thermal resistance is 0.095 \Degress/mW, and its near-field pattern exhibits a homogeneous distribution. The high-power radial bridge electrode VCSEL has better temperature and opto-electric characteristics.

Lifeng Hou, Gang Zhong, Yingjie Zhao, Yongzhuang Yang, Yuxia Wang, Yongqin Hao, Yuan Feng, Xiaoguang Jiang, Haorui Xie. Fabrication of high-power VCSEL with radial bridge electrodes[J]. Chinese Optics Letters, 2009, 7(8): 08709.

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