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环形子孔径拼接干涉检测非球面的建模与实验

Modeling and Experiment of Testing Asphere by Annular Subaperture Stitching Interferometer

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摘要

为实现球面波干涉检测非球面镜片,得到非球面镜片的完整面形信息,提出了基于标记的Givens变换,实现环形子孔径的精确定位和消旋转的处理。利用求解目标函数最小值的方法精确求解拟合波面以对子孔径数据进行处理,建立了全局优化拼接数学模型。对外径150 mm,内径100 mm的抛物面镜片进行三孔径拼接检测实验,均方根值为0.053 λ。对比补偿器法得到的全口径干涉检测结果均方根值ΔWrms=0.052 λ,相对误差为1.92%。实验结果表明,该方法稳定可靠,降低了传统的环形子孔径拼接干涉检测方法中对导轨的高精度要求。

Abstract

In order to obtain the whole aspheric lens′ surface information,measurement of aspheric optical components is implemented by using spheric wave interferometry.Problems of precise location and removing relative rotation are resolved by the Givens transform of markers′ position.Each subaperture′s data is processed by the best fitting wave front which is the solution of the least object function value.Global optimization stitching model is established.A parabolic mirror of 150 mm in outer diameter,100 mm in inner diameter was used in three annular subapertures stitching experiment,the obtained root mean square (RMS) is 0.053 λ.Compared with full caliber interference measurement results obtained by compensator method,ΔWrms=0.052 λ,the relative error of RMS is 1.92%.Experimental results indicate that the approach reduces the requirements of high-precision rail in traditional annular subaperture stitching interference measurement.

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中图分类号:TQ171.65

DOI:10.3788/aos20092911.3082

所属栏目:仪器,测量与计量

基金项目:国家863计划资助课题。

收稿日期:2008-12-30

修改稿日期:2009-02-13

网络出版日期:0001-01-01

作者单位    点击查看

王月珠:哈尔滨工业大学 光电子技术研究所可调谐激光技术国家级重点实验室,黑龙江 哈尔滨 150001
田义:哈尔滨工业大学 光电子技术研究所可调谐激光技术国家级重点实验室,黑龙江 哈尔滨 150001
李洪玉:哈尔滨工业大学空间光学工程研究中心,黑龙江 哈尔滨 150001
鞠有伦:哈尔滨工业大学 光电子技术研究所可调谐激光技术国家级重点实验室,黑龙江 哈尔滨 150001

联系人作者:王月珠(ty.hit.edu@163.com)

备注:王月珠|教授|主要从事光电子技术和固体激光器等方面的研究|(1942-),女,博士生导师。

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引用该论文

Wang Yuezhu,Tian Yi,Li Hongyu,Ju Youlun. Modeling and Experiment of Testing Asphere by Annular Subaperture Stitching Interferometer[J]. Acta Optica Sinica, 2009, 29(11): 3082-3087

王月珠,田义,李洪玉,鞠有伦. 环形子孔径拼接干涉检测非球面的建模与实验[J]. 光学学报, 2009, 29(11): 3082-3087

被引情况

【1】汪利华,吴时彬,任戈,谭毅,杨伟. 子孔径拼接检测光学系统波前机械定位误差补偿算法. 光学学报, 2012, 32(1): 112003--1

【2】徐新华,王青,宋波,傅英. 基于子孔径拼接技术的大尺寸光学材料均匀性检测系统. 光学学报, 2012, 32(4): 412002--1

【3】张磊,田超,刘东,师途,杨甬英,沈亦兵. 非球面非零位环形子孔径拼接干涉检测技术. 光学学报, 2014, 34(8): 812003--1

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