介绍了一种结构简单、制作方便的微米量级大气压等离子体射流。这种微等离子体射流由直流电源驱动,可在多种工作气体(如Ar,He,N2等)中实现大气压放电,产生高电流密度的辉光放电。为了确定微等离子射流产生的激发物种成分,测量了以Ar和N2为工作气体的等离子体发射光谱。利用发射光谱相对强度比值法测量了氩气微等离子体射流的电子激发温度。实验显示,其电子激发温度约为3 000 K,这远低于大气压等离子体炬的电子激发温度。利用N2的二正带发射光谱得到微等离子体的振动温度约为2 500 K;利用其电学参数估算电子密度在1013 cm-3量级。利用此微等离子体射流进行了普通打印纸表面处理的应用实验。结果显示,这种微等离子体射流能够明显的提高普通打印纸的亲水性。

In the present work,a simply designed and easy made micrometer plasma jet device operating under atmospheric pressure was characterized.The microplasma jet operates in many kinds of working gas at atmospheric pressure,such as Ar,He,N2 etc,and is powered by a direct current power source.It can generate high current density glow discharge.In order to identify various excited species generated by the direct current microplasma jet device,the optical emission spectra of the jet with argon or nitrogen as working gas were studied.Based on the optical emission spectroscopy analysis of argon microplasma jet,the electron excitation temperature was determined to be about 3 000 K by the intensity ratio of two spectral lines.It is much lower than the electron excitation temperature of atmospheric pressure plasma torch,and hints that the atmospheric pressure direct current microplasma jet is cold compared with the atmospheric pressure plasma torch.The emission spectra of the N2 second positive band system were used to determine the vibrational temperature of the atmospheric pressure direct current microplasma jet.The experimental result shows that the molecular vibrational temperature of N2 is about 2 500 K.The electron density of the microplasma jet is about 1013 cm-3,which can be estimated from the electrical parameters of the discharge in the microplasma jet.A simple example of application of the microplasma jet is given.General print paper surface was modified with the microplasma jet and afterwards a droplet test was carried out.It was shown that the microplasma jet is more efficient in changing the hydrophilicity of general print paper.