提出一种在多模光纤上腐蚀制作出法布里-珀罗(F-P)腔体,并将该F-P腔体和一根普通通信单模光纤熔接起来构成微型非本征型光纤F-P干涉(EFPI)应变传感器的方法。实验结果证明这种结构的干涉传感器对结构的微小应变有着极高的灵敏度,可达到0.00095 nm /με,而且对温度的交叉敏感较小。这种制备工艺简单、重复性高、易于批量加工的光纤应变传感器件在光传感领域,特别是对各种建筑结构健康状况的远程监测中具有较大的潜在应用价值。

A miniature extrinsic Fabry-Perot (F-P) interferometer (EFPI) sensor is fabricated by using simple etching and fusing method. The cavity is formed by wet chemical etching of multi-mode fiber (MMF) in hydrofluoric acid based solutions,then it is fused to the end of a single-mode fiber (SMF) to form a extrinsic F-P structure. Experiment results show that this kind of EFPI sensor has a high sensitivity to strain,but a low sensitivity to temperature. The strain sensitivity is about 0.00095 nm /μ ε. This kind of fiber sensor has many advantages,such as easy fabrication,high-repetition and mass-production,which offers great potential for sensing applications and especially for strain measurements in health monitoring of civil engineering structure.