光学学报, 2009, 29 (12): 3385, 网络出版: 2009-12-23
基于哈特曼-夏克波前传感器的波面拼接检测方法
Wavefront Stitching Detection Method Based on Hartmann-Shack Wavefront Sensor
波面拼接检测 哈特曼-夏克波前传感器 全局优化 最小二乘拟合 wavefront stitching detection Hartmann-Shack wavefront sensor comprehensively optimized linear least squares fitting
摘要
提出了一种利用小口径哈特曼-夏克(H-S)波前传感器检测大口径光学系统或元件的波面拼接检测方法。其基本原理是将待测大口径波面划分为多个小口径波面,通过最小二乘法得到各个子波面斜率图相对于基准子波面斜率图的拼接参数,恢复出全孔径波面斜率图,再利用模式法复原出待测波面。建立了全局优化拼接方式的数学模型,并进行实验验证。实验采用一有效口径37.5 mm的哈特曼-夏克波前传感器对一平面反射镜面60 mm的区域进行测试,将拼接波面与利用干涉仪直接测量的全孔径波面对比,其波面残差(RMS)值为0.04 λ,拼接算法精度达到λ/40。结果表明,全局优化拼接检测方案能够用于大口径光学表面的检测。
Abstract
A method for wavefront stitching detection,in which small-aperture Hartmann-Shack wavefront sensor is used to test large-aperture optical system or component,is proposed. The basic principle is to divide large wavefront into certain small ones;then,the slope data in the overlap regions are used in a linear least squares fitting routine to obtain stitching parameters between each sub-frame and the benchmark frame. These parameters are then used to construct the whole gradient map,which is later used to reconstruct the whole wavefront by modal algorithm. The mathematical model of comprehensively optimized stitching mode is established and verified in our experiment. A H-S wavefront sensor with valid aperture 37.5 mm is adopted to test a plane reflector′s 60 mm area and the stitching result is compared with the whole-aperture wavefront that directly acquired by an interferometer. The RMS value of the error wavefront is 0.04 λ and the algorithm accuracy reaches up to λ/40. It proves that the comprehensively optimized stitching mode could be used in large optical surface measurement.
郑翰清, 饶长辉, 饶学军, 姜文汉, 杨金生. 基于哈特曼-夏克波前传感器的波面拼接检测方法[J]. 光学学报, 2009, 29(12): 3385. Zheng Hanqing, Rao Changhui, Rao Xuejun, Jiang Wenhan, Yang Jinsheng. Wavefront Stitching Detection Method Based on Hartmann-Shack Wavefront Sensor[J]. Acta Optica Sinica, 2009, 29(12): 3385.