光电工程, 2009, 36 (10): 146, 网络出版: 2010-01-31
应力抛光技术实验装置的研究
Experimental Installation Investigation of Stressed Mirror Polishing
应力抛光技术 光学加工 实验装置 抛物面 光学测量 stressed mirror polishing optical fabrication experimental installation paraboloid optical measurement
摘要
基于弹性力学理论的应力抛光技术(SMP)是将非球面加工转化为球面加工的新技术,能够有效地提高非球面加工效率。由应力抛光技术的算法及有限元分析、模拟,针对玻璃材料自身的性质以及在球面镜周边施力或力矩来实现球面到非球面之间变形量的要求,设计、加工和装调一套专门用于应力抛光技术的实验装置。为了实现应力抛光技术中玻璃薄板的球面到抛物面之间的变形,以该装置加工了一块口径为Φ314 mm,F/7 的抛物面镜为例,抛光结束的抛物面其峰值(PV)为3.317λ,均方根(rms)为0.489λ,验证了应力抛光技术实验装置的合理性和有效性。
Abstract
Stressed Mirror Polishing (SMP) based on mechanics of elasticity is a novel aspheric fabrication technology that could transform aspheric optical fabrication technology into sphere optical fabrication technology. Considering glass characteristic and deformation between paraboloid and sphere surface generated by application moment periphery of thin-plate, experimental installation of stressed mirror polishing is designed, fabricated and adjusted in this paper. Having been fabricated a paraboloid mirror of Φ314 mm diameter and F/7 for example to analyze the optical fabrication technology progress of paraboloid, rationality and effectiveness of experimental installation have been investigated. By establishing measurement system of paraboloid to analyze the experiment result and adopting interferometer to get surface shape of finished paraboloid, PV=3.317λ, rms=0.489λ, the results indicate that the experimental installation of stressed mirror polishing can be used to produce the axisymmetric aspheric mirrors with high precision and efficiency.
孙天祥, 杨力, 吴永前, 万勇建, 范斌. 应力抛光技术实验装置的研究[J]. 光电工程, 2009, 36(10): 146. SUN Tian-xiang, YANG Li, WU Yong-qian, WAN Yong-jian, FAN Bin. Experimental Installation Investigation of Stressed Mirror Polishing[J]. Opto-Electronic Engineering, 2009, 36(10): 146.