Chinese Optics Letters, 2010, 8 (2): 181, Published Online: Mar. 5, 2010
Qualification of superpolished substrates for laser-gyro by surface integrated scatter measurement Download: 518次
测量 积分散射 超光滑基片 质量控制 120.5820 Scattering measurements 290.2558 Forward scattering 310.3840 Materials and process characterization 120.4640 Optical instruments
Abstract
Integrated scatterometer for qualification of superpolished substrates for laser-gyro by surface scatter loss measurement is constructed. Different from the qualification of substrate by surface roughness, the scatterometer measures the forward surface scatter loss to check whether the mirror made of the substrate will be suitable for the required laser-gyro lock-in specification. The scatterometer utilizes convex lens instead of integrating sphere to collect scatter light. Special sample support and baffle are designed to block unwanted light. The result of stability test is given, which is about 0.4% over 10 h.
Zhimeng Wei, Xingwu Long, Kaiyong Yang. Qualification of superpolished substrates for laser-gyro by surface integrated scatter measurement[J]. Chinese Optics Letters, 2010, 8(2): 181.