光学学报, 2010, 30 (2): 597, 网络出版: 2010-02-02
红外短波/长波分色片的研究
Design and Fabrication of Short-Wave /Long-Wave Infrared Dichroic Beam Splitter
薄膜光学 分色片 硒化锌基板 红外双波段成像光学系统 optical thin film dichroic beam splitter ZnSe substrate two-band infrared imaging system
摘要
短波红外/长波红外分色片在红外双波段成像光学系统中起着重要的作用。分析了分色片基板和薄膜材料的选择。选定硒化锌为基板,采用Ge,ZnSe和YbF3作为薄膜材料进行了优化设计,并对沉积温度和蒸发速率等工艺条件进行了优化,用电子束蒸发方法制备了该分色片,其反射率和透射率都达到了93%以上,已成功应用于实际光学系统中。
Abstract
Short-wave /long-wave infrared dichroic beam splitters take an important role in two-band infrared imaging optical systems. The choice of substrate and coating materials are discussed. Ge,ZnSe and YbF3 were chosen as film materials and ZnSe as substrate; The coating reflecting the shortwave infrared light while transmiting the longwave infrared (8-12 μm) light is analyzed,and the beam splitter is manufactured by electronic-beam evaporation. The measured reflectivity and transmittance of corresponding band are all above 93%. Such dichroic beam splitters have been successfully applied to the actual optical system.
章岳光, 王颖, 孙雪铮, 沈伟东, 刘旭, 顾培夫. 红外短波/长波分色片的研究[J]. 光学学报, 2010, 30(2): 597. Zhang Yueguang, Wang Ying, Sun Xuezheng, Shen Weidong, Liu Xu, Gu Peifu. Design and Fabrication of Short-Wave /Long-Wave Infrared Dichroic Beam Splitter[J]. Acta Optica Sinica, 2010, 30(2): 597.