光学 精密工程, 2008, 16 (7): 1153, 网络出版: 2010-02-28   

变栅距光栅光谱分辨研究

Study on resolving power of varied line-space grating
作者单位
中国科学技术大学 国家同步辐射实验室,安徽 合肥 230029
摘要
基于夫琅禾费衍射理论,推导了平行光入射变栅距光栅后衍射光强的角度分布。计算了变栅距光栅参数相同,入射光斑宽度分别为5 mm和10 mm时,衍射光的分布特点和变栅距光栅参数不同,入射光斑宽度为10 mm时,衍射光的分布特点。实验验证了不同入射光斑宽度对光纤式变栅距光栅位移传感器分辨率的影响。结果表明:基于变栅距光栅的衍射特点,入射光斑直径的大小是影响传感器分辨率的一个重要因素。
Abstract
On the basis of Fraunhofer diffraction theory,the diffraction patterns of a Varied Line-space(VLS) grating were obtained for incidence beam in parallel and uniform.The intensities of the diffraction spots changing with diffraction angles were figured out and pictured,when the diameter of incident spots were 5 mm and 10 mm to the same VLS grating,and 10 mm to different VLS gratings.The result was validated by the experimentation for the sensor's resolving power when the diameter of incident spot was different to the same VLS grating.The result reveals that the diameter of incident spot is very important to the sensor's resolving power for the diffraction pattern of VLS grating.

刘正坤, 谭鑫, 徐向东, 洪义麟, 付绍军. 变栅距光栅光谱分辨研究[J]. 光学 精密工程, 2008, 16(7): 1153. LIU Zheng-kun, TAN Xin, XU Xiang-dong, HONG Yi-lin, FU Shao-jun. Study on resolving power of varied line-space grating[J]. Optics and Precision Engineering, 2008, 16(7): 1153.

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