强激光与粒子束, 2009, 21 (11): 1677, 网络出版: 2010-02-28
基于高分辨力CCD的大口径光学元件疵病检测
Defect testing of large aperture optics based on high resolution CCD camera
摘要
介绍了一种利用高分辨力CCD快速检测大口径光学元件表面和体内疵病的方法。利用侧照明方式对大口径光学元件进行均匀掠射照明,表面和体内疵病因为散射在暗室成像过程中影像被放大。对比研究了疵病示踪尺寸和真实尺寸,得出近似数学关系,利用高分辨力CCD,通过一次性成像获得光学元件疵病尺寸近似值、2维空间位置等定量描述表面特征的信息。
Abstract
A fast testing method on inspecting defects of large aperture optics was introduced. With uniform illumination by LED source at grazing incidence,the image of defects on the surface of and inside the large aperture optics could be enlarged due to scattering. The images of defects were got by high resolution CCD camera and microscope,and the approximate mathematical relation between viewing dimension and real dimension of defects was simulated. Thus the approximate real dimension and location of all defects could be calculated through the high resolution pictures.
程晓锋, 徐旭, 张林, 贺群, 袁晓东, 蒋晓东, 郑万国. 基于高分辨力CCD的大口径光学元件疵病检测[J]. 强激光与粒子束, 2009, 21(11): 1677. Cheng Xiaofeng, Xu Xu, Zhang Lin, He Qun, Yuan Xiaodong, Jiang Xiaodong, Zheng Wanguo. Defect testing of large aperture optics based on high resolution CCD camera[J]. High Power Laser and Particle Beams, 2009, 21(11): 1677.