光学学报, 2010, 30 (4): 1197, 网络出版: 2010-04-20
锗窗口红外宽光谱增透膜的研制
Design and Manufacture of Broadband Infrared Antireflection Coatings for Germanium Windows
薄膜 红外光学薄膜 宽光谱增透膜 非对称等效层 光学参数 thin films infrared optical coatings broadband antireflection coatings non-symmetrical equivalent layers optical coefficients
摘要
红外宽光谱增透膜作为红外光学系统中的关键元件,其研究是一项比较复杂而备受重视的工作。针对风云二号辐射计锗窗口的宽光谱增透膜的要求,通过对镀膜材料在既定工艺条件下的光学参数的准确拟合,采用非对称等效层理论,并将材料光学参数拟合值代入到膜系的优化过程中,从而得到能够与实际情况接近的理论设计膜系。经过工艺优化后,研制出的宽光谱增透膜在要求的3.5-4.0 mm,6.3-7.6 mm,10.3-11.3 mm三个通道的平均透射率均大于96%,而11.5-12.5 mm通道的平均透射率大于94%。膜层能够经受住浸泡、高温高湿等一系列环模试验的检验,完全满足项目的使用要求。
Abstract
As the key components of the IR optical systems,infrared (IR) antireflection (AR) coatings are such important topic and the study of them are so complex. According to the demands of germanium(Ge)windows for the researching project,non-symmetrical equivalent layers theory are adopted to design the multilayer broadband AR coatings. The optical coefficients of the coating materials are fitted at established technics conditions and all the fitted optical coefficients are used in the layer thickness optimization process. A theoretical design approaching to the factual situation is obtained. After the optimization of the deposition technics,high performance broadband AR coatings are finished. The average transmittance of the spectrum tunnels such as 3.5-4.0 μm,6.3-7.6 μm,10.3-11.3 μm is more than 96% and the average transmiffance of the tunnel 11.5-12.5 μm is more than 94%. All the AR coatings can experience the environment tests and meet the optical system′s request.
于天燕, 成效春, 秦杨, 刘定权, 张凤山. 锗窗口红外宽光谱增透膜的研制[J]. 光学学报, 2010, 30(4): 1197. Yu Tianyan, Cheng Xiaochun, Qin Yang, Liu Dingquan, Zhang Fengshan. Design and Manufacture of Broadband Infrared Antireflection Coatings for Germanium Windows[J]. Acta Optica Sinica, 2010, 30(4): 1197.