利用聚焦的飞秒激光（中心波长775 nm、脉宽150 fs）照射FOTURAN光敏玻璃，经热处理及浓度为8％的氢氟酸溶液室温腐蚀50 min后，在FOTURAN玻璃表面制作了微凹面.利用原子力显微镜和扫描电子显微镜分析了微凹面的形貌，发现它具有光滑璧面和清晰边缘，直径约为几十微米.通过分别改变入射激光的单脉冲能量(970~3250 nJ)和脉冲数目(10~3000个)，研究了它们对微凹面制作结果的影响，发现了微凹面的直径随激光入射参量的饱和效应，并解释了其原因；指出了飞秒激光在FOTURAN上制作微结构的应用.

Micro-concave-surfaces were fabricated on the surface of a photosensitive glass (FOTURAN) by focused irradiation of femtosecond laser (with 775 nm-wavelength and 150 fs-pulse duration),heat treatment and wet chemical etching in 8% ultrasonic solution of hydrofluoric acid (HF) for 50 minutes at room temperature.The morphologies of the micro-concave-surfaces were analyzed by atomic force microscope (AFM) and scanning electron microscope (SEM).The analysis indicates that the micro-concave-surfaces have smooth wall,clear edge,and are several tens of microns in diameter.By varying the incident single pulse energy (from 970 to 3 250 nJ) and number of pulses (from 10 to 3 000 shots),influences of these two laser parameters on the fabrication results were characterized.The diameters of micro-concave-surfaces were found to saturate with these two incident parameters,and the reason was given.And,applications of mcirostructures fabricated on FOTURAN by femtosecond laser were pointed out.