光子学报, 2009, 38 (8): 2046, 网络出版: 2010-05-10
用光学透射谱分析薄膜光学参量的一种简易方法
A Simple Method of Deducing the Optical Constants of Thin Films Using the Optical Transmission Spectrum
摘要
基于经典的色散理论建立的单振子光谱分析模型，通过理论推导，借助计算机辅助处理，提出了一种比较简捷直观的只利用垂直透射光谱对薄膜光谱进行分析的方法.利用这种方法分析了直流溅射制备的ZnO薄膜的透射光谱，计算出了薄膜在透明振荡区的折射率色散关系以及厚度等参量，并对分析方法给出了验证.
Abstract
According to the single oscillator expression, based on a based on classic electromagnetic dispersion model,a simple and efficient computer program aided method for deducing the optical refractive index and thickness of a thin film from the normal-incident transmission spectrum was proposed.A dc sputtered ZnO film was analyzed using the method,The results demonstrated that the method is practicable.
赵强, 王基庆, 柴志方. 用光学透射谱分析薄膜光学参量的一种简易方法[J]. 光子学报, 2009, 38(8): 2046. ZHAO Qiang, WANG Ji-qing, CHAI Zhi-fang. A Simple Method of Deducing the Optical Constants of Thin Films Using the Optical Transmission Spectrum[J]. ACTA PHOTONICA SINICA, 2009, 38(8): 2046.
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