光电子技术, 2009, 29 (3): 211, 网络出版: 2010-05-10
激光诱导的光热技术在半导体检测中的应用
Application on Laser-induced Photothermal Technique to Semiconductor Property Measurement
光电检测 半导体特性 光热技术 热波 photoelectric detection semiconductor properties photothermal technique thermal waves
摘要
综述了近些年来国内外半导体检测的光学技术研究的最新进展。重点阐述了基于光声光热效应的半导体检测技术的最新发展动态, 其中分别对光热偏转(PTD)、光热调制反射(PMTR)、光热辐射(PTR)、光生载流子辐射(PCR)进行了详细介绍, 最后提出了半导体检测技术的发展方向。
Abstract
The latest progress of the photo-thermal technique used to measure semiconductor properties is reviewed. The several methods based on the photothermal effects, such as photothermal deflection,photomodulated thermoreflectance, photothermal radiometry, and photo-carrier radiometry, which are applied to measure semiconductor properties are discussed. The development direction of semiconductor technology is prospected.
曾宏亮, 张希仁, 高椿明, 周鹰, 王占平. 激光诱导的光热技术在半导体检测中的应用[J]. 光电子技术, 2009, 29(3): 211. Zeng Hongliang, Zhang Xiren, Gao Chunming, Zhou Ying, Wang Zhanping. Application on Laser-induced Photothermal Technique to Semiconductor Property Measurement[J]. Optoelectronic Technology, 2009, 29(3): 211.
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