利用磁控溅射法在K9玻璃基底上制备了SiN/Sb80Bi20/SiN相变薄膜结构,并利用连续He-Ne激光共焦Z-扫描技术同时测量了在激光作用下透射和反射非线性光学响应。实验结果表明,相变膜在激光焦点处的反射和透射信号由于薄膜的相变表现为非线性响应特性。薄膜在焦点处的透射信号强度随着扫描激光功率的增强逐渐增大直至饱和。这是由于在激光的作用下形成了相变微区,随着扫描功率的增加,相变区域逐渐变大引起的。对不同功率激光扫描后的样品进行了低于相变阈值的重复扫描实验,结果表明,相变区域具有较高的光热稳定性,说明BiSb相变薄膜具有相变数据存储潜在应用价值。

Phase change films with SiN/Sb80Bi20/SiN structure are deposited on the K9 glass substrates by direct current magnetron sputtering. Nonlinear optical response of transmittance and reflectance of the films is investigated using a confocal Z-scan technique with a continuous wave He-Ne laser. The results indicate that the transmittance and reflectance at focus both have nonlinear response induced by phase change. The transmittance at focus increases with the increasing of scan power and keeps a saturated value. Formation of phase change micro-area can be achieved at focus of scan laser,and the area will increase with the increasing of scan power. The transmittance of irradiated sample under different powers was studied with in situ repetitive method;and the repetitive power is smaller than the phase change threshold. The results of repetitive Z-scan experiments indicate that the phase change area have a good opto-thermal stability. BiSb films show potential capability for phase change data storage.