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Constructing multilayers with absorbing materials

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Abstract

The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50–92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance.

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收稿日期:2009-10-31

录用日期:--

网络出版日期:0001-01-01

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Juan I. Larruquert:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
Manuela Vidal-Dasilva:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
Sergio García-Cortés:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
Mónica Fernández-Perea:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
José A. Méndez:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
and José A. Aznárez:GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain

联系人作者:联系作者(larruquert@ifa.cetef.csic.es)

备注:This work was supported by the National Programme for Space Research, Subdireccion General de Proyectos de Investigacion, Ministerio de Ciencia e Innovacion (Nos. ESP2005-02650 and AYA2008-06423-C03-02/ESP: AYA2009-14070). M. V. is thankful to Ministerio de Educacion y Ciencia for the funding under the FPI BES-2006-14047 fellowship. S. Garc?a-Cortes and M. Fernandez-Perea are thankful to Consejo Superior de Investigaciones Cientificas (Spain) for funding under the Programa I3P, partially supported by the European Social Fund. At present, M. Fernandez-Perea is at Lawrence Livermore National Laboratory, 7000 EastAvenue, Livermore, California 94550, USA. We likewise acknowledge the technical assistance of Jose M. Sanchez-Orejuela.

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引用该论文

Juan I. Larruquert, Manuela Vidal-Dasilva, Sergio Garc?a-Cortes, Monica Fernandez-Perea, Jose A. Mendez, Jose A. Aznarez, "Constructing multilayers with absorbing materials," Chinese Optics Letters 8(s1), 159-162 (2010)

被引情况

【1】. Analytical and experimental demonstration of depth of field extension for incoherent imaging system with a standard sinusoidal phase mask. Chinese Optics Letters, 2012, 10(3): 31101-31104

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