Chinese Optics Letters, 2010, 8 (s1): 159, Published Online: May. 14, 2010  

Constructing multilayers with absorbing materials Download: 587次

Author Affiliations
GOLD-Instituto de Fisica Aplicada, CSIC, Serrano 144, 28006 Madrid, Spain
Abstract
The strong absorption of materials in the extreme ultraviolet (EUV) above ~50 nm has precluded the development of efficient coatings. The development of novel coatings with improved EUV performance is presented. An extensive research was performed on the search and characterization of materials with moderate absorption, such as various lanthanides. Based on this research, novel multilayers based on Yb, Al, and SiO have been developed with a narrowband performance in the 50–92 nm range. Furthermore, procedures for the design of multi-material multilayers with absorbing materials have been derived, which resulted in multilayers with enhanced reflectance.

Juan I. Larruquert, Manuela Vidal-Dasilva, Sergio Garc?a-Cortes, Monica Fernandez-Perea, Jose A. Mendez, Jose A. Aznarez. Constructing multilayers with absorbing materials[J]. Chinese Optics Letters, 2010, 8(s1): 159.

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