光子学报, 2010, 39 (4): 584, 网络出版: 2010-05-24
飞秒激光制造微型光纤法布里-珀罗干涉传感器
Fabricating Micro Fiber Fabry-Perot Sensor with Femtosecond Laser Pulses
飞秒激光 光纤F-P干涉型传感器 平行度和光洁度 Femtosecond laser Fiber-optic Fabry-Perot cavity Parallelism and Surface roughness
摘要
基于飞秒激光光刻技术,提出了光纤端面光刻制造微型光纤法布里-珀罗干涉传感器的方案.该方案解决了传统飞秒激光制造光纤F-P传感器的平行度差的问题,制造了对比度超过20 dB的高灵敏度和高分辨率的微型F-P光纤传感器件.该制造方法简单、参量可控,制作的器件可应用恶劣温度条件下应变的精确测量.
Abstract
Based on femtosecond laser inscription technology,a novel method for femtosecond laser micromachining system is proposed to fabricate a microfiber Fabry-Perot (F-P) cavity on the fiber end surface.This technique can solve the parallelism problem of the traditional fiber F-P sensors inscribed by femtosecond laser.The F-P interferometric sensor made by the proposed technique shows over 20 dB fringe visibility.This technique is parameter-controllable and easy to implement.It is a promising candidate of strain measurement in the case of extreme temperature circumstances.
吴易明, 李明, 程光华. 飞秒激光制造微型光纤法布里-珀罗干涉传感器[J]. 光子学报, 2010, 39(4): 584. WU Yi-ming, LI Ming, CHENG Guang-hua. Fabricating Micro Fiber Fabry-Perot Sensor with Femtosecond Laser Pulses[J]. ACTA PHOTONICA SINICA, 2010, 39(4): 584.