光子学报, 2010, 39 (4): 709, 网络出版: 2010-05-24
莫尔条纹法测量微小旋转角度的频域分析
Frequency Domain Analysis of Small Angle Measurement with Moire Fringe
摘要
利用菲涅耳衍射的频域分析方法,对莫尔条纹复振幅分布公式进行了理论推导,得到了使用两块相同光栅组成的光栅付测量微小角度的原理公式,与利用几何光学等方法得到的结论一致.模拟结果表明:莫尔条纹是光栅付拍现象的最低频率含量,莫尔条纹内含有大量高次谐波;在探测器光学系统放大率一定的前提下,为通过直接测量莫尔条纹宽度的变化达到测量角度变化的目的,必须根据测角精度、探测器的尺寸和分辨率选择合适的光栅付光栅常数和光栅付初始夹角.
Abstract
The moire fringe′s amplitude distribution is analyzed by using the frequency domation analyses of Fresnel diffracting.The formula of small angle measurment using the grating pair composed of the same gratings is gained.The formulas gained by frequency domain analysis are the same with those gained by geometrical method.The results show that moire fringe is composed of lots of vertical small fringes.To measure the small angle directly by the change of the width of the moire fringe,a initial angle is needed,and it′s value is decided by the magnification of detector′s optical system,the angle measuring precision,the size and the resolution of the detector.
方靖岳, 秦石乔, 王省书, 黄宗升, 郑佳兴. 莫尔条纹法测量微小旋转角度的频域分析[J]. 光子学报, 2010, 39(4): 709. FANG Jing-yue, QIN Shi-qiao, WANG Xing-shu, HUANG Zong-sheng, ZHENG Jia-xing. Frequency Domain Analysis of Small Angle Measurement with Moire Fringe[J]. ACTA PHOTONICA SINICA, 2010, 39(4): 709.