强激光与粒子束, 2010, 22 (2): 361, 网络出版: 2010-05-28   

基于弹性力学的应力加工方法有限元分析

Finite element analysis of stressed mirror polishing based on elasticity mechanics
作者单位
1 中国科学院 光电技术研究所,成都 610209
2 中国科学院 研究生院,北京100039
摘要
基于弹性力学理论,对应力加工方法的原理、算法及玻璃薄板对复杂面型的模拟进行了研究。在球面镜周边分布力和力矩的状态下对球面变形为轴对称非球面进行了分析,以抛物面镜为例,采用有限元法对玻璃薄板周边施加均布弯矩后产生的变形量和最大应力进行了模拟、分析和仿真计算,得出的仿真结果与球面和抛物面之间的理想变形量进行比较,验证了基于弹性力学的应力加工方法加工旋转对称非球面理论的正确性。
Abstract
Based on the elasticity mechanics theory,the principle and calculation method of stressed mirror polishing(SMP) are studied,as well as the simulation of complex surfaces with elastic optical thin plates. The change of sphere into axisymmetric aspheric surface is analyzed with forces applied around the spherical mirror. Considering the fabrication of a parabolic mirror,the deformation and the maximal stress of thin mirror plate have been simulated with bending moments applied around. The simulated deformation between spheree and paraboloid is compared with the theoretical deformation,which indicates that SMP sphere and paraboloid is compared with the theoretical deformation,which indicates that SMP can produce rotationally symmetric aspheric mirrors with high precision and efficiency.

孙天祥, 杨力, 吴永前, 雷柏平, 万勇建. 基于弹性力学的应力加工方法有限元分析[J]. 强激光与粒子束, 2010, 22(2): 361. Sun Tianxiang, Yang Li, Wu Yongqian, Lei Baiping, Wan Yongjian. Finite element analysis of stressed mirror polishing based on elasticity mechanics[J]. High Power Laser and Particle Beams, 2010, 22(2): 361.

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